US PATENT SUBCLASS 438 / FOR 446
BEAM WRITING OF PATTERNS (437/935)

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

FOR 446BEAM WRITING OF PATTERNS (437/935)

DEFINITION

Classification: 438/FOR.446

BEAM WRITING OF PATTERNS:

Foreign art collection involving use of beam energy to create patterns.