US PATENT SUBCLASS 438 / FOR 445
DOPANT ACTIVATION PROCESS (437/934)
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 445
DOPANT ACTIVATION PROCESS (437/934)
DEFINITION
Classification: 438/FOR.445
DOPANT ACTIVATION PROCESS:
Foreign art collection involving steps taken to activate a dopant.