US PATENT SUBCLASS 438 / FOR 444
DUAL SPECIES IMPLANTATION OF SEMICONDUCTOR (437/933)
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 444
DUAL SPECIES IMPLANTATION OF SEMICONDUCTOR (437/933)
DEFINITION
Classification: 438/FOR.444
DUAL SPECIES IMPLANTING OF SEMICONDUCTOR:
Foreign art collection involving the use of two dopant sources during implantation so as to simultaneously implant both dopants.
