US PATENT SUBCLASS 438 / FOR 440
RADIATION ENHANCED DIFFUSION (R.E.D.) (437/929)
Current as of:
June, 1999
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 440
RADIATION ENHANCED DIFFUSION (R.E.D.) (437/929)
DEFINITION
Classification: 438/FOR.440
RADIATION ENHANCED DIFFUSION (R.E.D.):
Foreign art collection involving a diffusion process assisted by use of radiation.