US PATENT SUBCLASS 438 / FOR 439
ENERGY BEAM TREATING RADIATION RESIST ON SEMICONDUCTOR (437/928)
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 439
ENERGY BEAM TREATING RADIATION RESIST ON SEMICONDUCTOR (437/928)
DEFINITION
Classification: 438/FOR.439
ENERGY BEAM TREATING RADIATION RESIST ON SEMICONDUCTOR:
Foreign art collection involving use of energy beam to irradiate a resist responsive thereto located on a semiconductor.
