US PATENT SUBCLASS 438 / FOR 333
APPLYING CORPUSCULAR OR ELECTROMAGNETIC ENERGY (437/173)
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 333
APPLYING CORPUSCULAR OR ELECTROMAGNETIC ENERGY (437/173)
{1}
FOR 334
DF
.~
> To anneal (437/174)
DEFINITION
Classification: 438/FOR.333
APPLYING CORPUSCULAR OR ELECTROMAGNETIC ENERGY:
Foreign art collection for processes including the step of applying energy in the form of electromagnetic radiation or corpuscular emissions, e.g., alpha, beta, cosmic, etc.
