US PATENT SUBCLASS 438 / FOR 330
DIRECTLY APPLYING ELECTRICAL CURRENT (437/170)
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
FOR 330
DIRECTLY APPLYING ELECTRICAL CURRENT (437/170)
{2}
FOR 331
DF
.~
> And regulating temperature (437/171)
FOR 332
DF
.~
> Alternating or pulsed current (437/172)
DEFINITION
Classification: 438/FOR.330
DIRECTLY APPLYING ELECTRICAL CURRENT:
Foreign art collection for processes including the step having an electric current come in contact with the semiconductor material.