US PATENT SUBCLASS 438 / FOR 148
THERMOMIGRATION (437/14)

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

FOR 148THERMOMIGRATION (437/14)

DEFINITION

Classification: 438/FOR.148

THERMOMIGRATION:

Foreign art collection for subject matter wherein impurities are diffused in a substrate under a temperature gradient which causes impurities to diffuse toward the hotter end.