US PATENT SUBCLASS 438 / 978
FORMING TAPERED EDGES ON SUBSTRATE OR ADJACENT LAYERS
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
978
FORMING TAPERED EDGES ON SUBSTRATE OR ADJACENT LAYERS
DEFINITION
Classification: 438/978
FORMING TAPERED EDGES ON SUBSTRATE OR ADJACENT LAYERS
Art collection involving the formation of nonperpendicular edges on the semiconductor substrate or layers residing thereupon.
