US PATENT SUBCLASS 438 / 970
SPECIFIED ETCH STOP MATERIAL
Current as of:
June, 1999
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438 /
HD
SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
970
SPECIFIED ETCH STOP MATERIAL
DEFINITION
Classification: 438/970
SPECIFIED ETCH STOP MATERIAL
Art collection involving the use of a specified material as an etch stop.
