US PATENT SUBCLASS 438 / 963
REMOVING PROCESS RESIDUES FROM VERTICAL SUBSTRATE SURFACES
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
963
REMOVING PROCESS RESIDUES FROM VERTICAL SUBSTRATE SURFACES
DEFINITION
Classification: 438/963
REMOVING PROCESS RESIDUES FROM VERTICAL SUBSTRATE SURFACES
Art collection involving the removal of unwanted process residues from vertical surfaces of the substrate.
