US PATENT SUBCLASS 438 / 954
MAKING OXIDE-NITRIDE-OXIDE DEVICE
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
954
MAKING OXIDE-NITRIDE-OXIDE DEVICE
DEFINITION
Classification: 438/954
MAKING OXIDE-NITRIDE-OXIDE DEVICE
Art collection involving construction of a device having a layered dielectric structure composed of a nitride layer interposed between outer oxide layers.
