US PATENT SUBCLASS 438 / 941
LOADING EFFECT MITIGATION

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

941LOADING EFFECT MITIGATION

DEFINITION

Classification: 438/941

LOADING EFFECT MITIGATION:

Art collection involving the minimalization of localized variations in the processing behavior of the substrate due to variations in the density of features formed thereupon.