US PATENT SUBCLASS 438 / 940
LASER ABLATIVE MATERIAL REMOVAL
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
940
LASER ABLATIVE MATERIAL REMOVAL
DEFINITION
Classification: 438/940
LASER ABLATIVE MATERIAL REMOVAL:
Art collection involving the removal of material from a semiconductor substrate by laser ablation.
