US PATENT SUBCLASS 438 / 939
LANGMUIR-BLODGETT FILM UTILIZATION
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
939
LANGMUIR-BLODGETT FILM UTILIZATION
DEFINITION
Classification: 438/939
LANGMUIR-BLODGETT FILM UTILIZATION:
Art collection involving the use of an organic coating having both hydrophilic and hydrophobic ends in semiconductor manufacture.
