US PATENT SUBCLASS 438 / 938
LATTICE STRAIN CONTROL OR UTILIZATION
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
938
LATTICE STRAIN CONTROL OR UTILIZATION
DEFINITION
Classification: 438/938
LATTICE STRAIN CONTROL OR UTILIZATION:
Art collection involving the regulation or utilization of lattice strain.