US PATENT SUBCLASS 438 / 934
SHEET RESISTANCE (I.E., DOPANT PARAMETERS)
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
934
SHEET RESISTANCE (I.E., DOPANT PARAMETERS)
DEFINITION
Classification: 438/934
SHEET RESISTANCE (I.E., DOPANT PARAMETERS):
Art collection directed to the electrical resistivity of a thin film of semiconductor material.
