US PATENT SUBCLASS 438 / 927
ELECTROMIGRATION RESISTANT METALLIZATION
Current as of:
June, 1999
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
927
ELECTROMIGRATION RESISTANT METALLIZATION
DEFINITION
Classification: 438/927
ELECTROMIGRATION RESISTANT METALLIZATION:
Art collection directed to metallization constructed so as to prevent the mass transport of metal by momentum exchange between thermally activated metal ions and conduction charge carriers.
