US PATENT SUBCLASS 438 / 913
DIVERSE TREATMENTS PERFORMED IN UNITARY CHAMBER
Current as of:
June, 1999
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438 /
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SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS
913
DIVERSE TREATMENTS PERFORMED IN UNITARY CHAMBER
DEFINITION
Classification: 438/913
DIVERSE TREATMENTS PERFORMED IN UNITARY CHAMBER:
Art collection involving diverse treatments performed upon a semiconductor substrate which are affected in a single processing chamber.
