US PATENT SUBCLASS 438 / 905
CLEANING OF REACTION CHAMBER

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

905CLEANING OF REACTION CHAMBER

DEFINITION

Classification: 438/905

CLEANING OF REACTION CHAMBER:

Art collection involving cleaning an etch chamber.