US PATENT SUBCLASS 438 / 512
.~ Involving nuclear transmutation doping

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

510  DF  INTRODUCTION OF CONDUCTIVITY MODIFYING DOPANT INTO SEMICONDUCTIVE MATERIAL {7}
512.~ Involving nuclear transmutation doping

DEFINITION

Classification: 438/512

Involving nuclear transmutation doping:

(under subclass 510) Process for introducing a dopant into semiconductor regions of the substrate having a combination of diverse steps in which one step involves the conversion of an element into a dopant by nuclear transmutation.

SEE OR SEARCH CLASS

376, Induced Nuclear Reactions, Systems, and Elements,

183, for per se nuclear transmutation doping of semiconductors.