US PATENT SUBCLASS 438 / 476
.~ By layers which are coated, contacted, or diffused

Current as of: June, 1999
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438 /   HD   SEMICONDUCTOR DEVICE MANUFACTURING: PROCESS

471  DF  GETTERING OF SUBSTRATE {4}
476.~ By layers which are coated, contacted, or diffused

DEFINITION

Classification: 438/476

By layers which are coated, contacted, or diffused:

(under subclass 471) Process wherein the substrate is exposed to a specified material by (a) depositing a layer of the material on the substrate, (b) physically contacting the substrate with the material, or (c) diffusing into the substrate a gettering species to form a gettering region in the substrate.