(under subclass 569) Processes wherein microwave energy is utilized to activate or initiate the plasma.
(1) Note. The wavelength of microwave is measured as 1mm to 1m and its FCC allowed frequency is 2.45 GHz.
(2) Note. Microwave is a term applied to electromagnetic waves which occupy a region in the electromagnetic spectrum which is bounded by radio waves on the side of longer
wavelengths and by infrared waves on the side of shorter wavelengths.