US PATENT SUBCLASS 423 / 346
.~.~.~ By reacting vapor phase silicon compound with carbon or carbon containing compound


Current as of: June, 1999
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423 /   HD   CHEMISTRY OF INORGANIC COMPOUNDS

324  DF  SILICON OR COMPOUND THEREOF {4}
344  DF  .~ Binary compound (e.g., silicide, etc.) {2}
345  DF  .~.~ Of carbon (i.e., silicon carbide) {1}
346.~.~.~ By reacting vapor phase silicon compound with carbon or carbon containing compound


DEFINITION

Classification: 423/346

(under subclass 345) Processes which include the step of reacting carbon or a carbon containing compound with a silicon containing compound that is in the vapor phase.