423 / | HD | CHEMISTRY OF INORGANIC COMPOUNDS |
324 | DF | SILICON OR COMPOUND THEREOF {4} |
344 | DF | .~ Binary compound (e.g., silicide, etc.) {2} |
345 | DF | .~.~ Of carbon (i.e., silicon carbide) {1} |
346 | .~.~.~ By reacting vapor phase silicon compound with carbon or carbon containing compound |