| 423 / | HD | CHEMISTRY OF INORGANIC COMPOUNDS |
| 324 | DF | SILICON OR COMPOUND THEREOF {4} |
| 344 | DF | .~ Binary compound (e.g., silicide, etc.) {2} |
| 345 | | .~.~ Of carbon (i.e., silicon carbide) {1} |
| 346 | DF | .~.~.~> By reacting vapor phase silicon compound with carbon or carbon containing compound |