US PATENT SUBCLASS 356 / 937
.~.~.~ Ellipsometry (GO1N 21/21B)


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356 /   HD   OPTICS: MEASURING AND TESTING

928  DD  INVESTIGATING OR ANALYZING MATERIALS BY THE USE OF OPTICAL MEANS, I.E., USING INFRA-RED, VISIBLE, OR ULTRA-VIOLET LIGHT (GO1N 21/00) {5}
931  DD  .~ Systems in which incident light is modified in accordance with the properties of material investigated (GO1N 21/17) {8}
936  DD  .~.~ Polarization-affecting properties (GO1N 21/21) {2}
937.~.~.~ Ellipsometry (GO1N 21/21B)