US PATENT SUBCLASS 250 / 310
.~ Electron probe type

Current as of: June, 1999
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250 /   HD   RADIANT ENERGY

306  DF  INSPECTION OF SOLIDS OR LIQUIDS BY CHARGED PARTICLES {6}
310.~ Electron probe type

DEFINITION

Classification: 250/310

(under subclass 306) Subject matter having means to project a concentrated beam of electrons against the object or material, and means to detect secondary radiation emitted from the object or material, or electrons deflected by the object or material.