US PATENT SUBCLASS 250 / 307
.~ Methods
Current as of:
June, 1999
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250 /
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RADIANT ENERGY
306
DF
INSPECTION OF SOLIDS OR LIQUIDS BY CHARGED PARTICLES
{6}
307
.~ Methods
DEFINITION
Classification: 250/307
(under subclass 306) Subject matter which includes processes for inspecting an object or material with charged particles.