US PATENT SUBCLASS 118 / 733
.~ Chamber seal

Current as of: June, 1999
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118 /   HD   COATING APPARATUS

715  DF  GAS OR VAPOR DEPOSITION {9}
733.~ Chamber seal

DEFINITION

Classification: 118/733

Chamber seal:

(under subclass 715) Apparatus wherein a means is provided to prevent communication between a coating chamber and the exterior environment.

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