US PATENT SUBCLASS 118 / 725
.~.~.~ Substrate heater

Current as of: June, 1999
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118 /   HD   COATING APPARATUS

715  DF  GAS OR VAPOR DEPOSITION {9}
722  DF  .~ With treating means (e.g., jarring) {2}
724  DF  .~.~ By means to heat or cool {1}
725.~.~.~ Substrate heater

DEFINITION

Classification: 118/725

Substrate heater:

(under subclass 724) Apparatus wherein the temperature altering means heats the base or a support for the base.