US PATENT SUBCLASS 118 / 719
.~ Multizone chamber

Current as of: June, 1999
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118 /   HD   COATING APPARATUS

715  DF  GAS OR VAPOR DEPOSITION {9}
719.~ Multizone chamber

DEFINITION

Classification: 118/719

Multizone chamber:

(under subclass 715) Apparatus wherein the coating apparatus is divided into a number of distinct areas wherein different aspects of the coating treatment can be performed.