US PATENT SUBCLASS 117 / 935
.~ Silicon from vapor or gaseous state {C30B 29/06}
Current as of:
June, 1999
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117 /
HD
SINGLE-CRYSTAL, ORIENTED-CRYSTAL, AND EPITAXY GROWTH PROCESSES; NON-COATING APPARATUS THEREFOR
928
DF
SINGLE-CRYSTAL OF PURE OR INTENTIONALLY DOPED ELEMENT {C30B 29/02}
{5}
935
.~ Silicon from vapor or gaseous state {C30B 29/06}
DEFINITION
Classification: 117/935
Silicon from vapor or gaseous state [C30B 29/06]:
A collection of art under art collection 928 disclosing growing silicon single-crystal* grown from the vapor or gaseous state.
SEE OR SEARCH CLASS
252, Compositions,
62.3+, for barrier layer compositions, per se (i.e., dopant* containing semiconductor materials).