117 / | HD | SINGLE-CRYSTAL, ORIENTED-CRYSTAL, AND EPITAXY GROWTH PROCESSES; NON-COATING APPARATUS THEREFOR |
|
11 | DF | PROCESSES OF GROWTH FROM LIQUID OR SUPERCRITICAL STATE {7} |
13 | DF | .~ Having pulling during growth (e.g., Czochralski method, zone drawing) {9} |
30 | DF | .~.~ With liquid flow control or manipulation during growth (e.g., mixing, replenishing, magnetic levitation, stabilization, convection control, baffle) {3} |
33 | DF | .~.~.~ Replenishing of precursor during growth (e.g., continuous method, zone pulling) {1} |
34 | | .~.~.~.~ Including significant cooling or heating detail |