117 / | HD | SINGLE-CRYSTAL, ORIENTED-CRYSTAL, AND EPITAXY GROWTH PROCESSES; NON-COATING APPARATUS THEREFOR |
11 | DF | PROCESSES OF GROWTH FROM LIQUID OR SUPERCRITICAL STATE {7} |
13 | DF | .~ Having pulling during growth (e.g., Czochralski method, zone drawing) {9} |
19 | .~.~ Forming an intended mixture (excluding mixed crystal) (e.g., doped) {2} | |
20 | DF | .~.~.~> Comprising a silicon crystal with oxygen containing impurity |
21 | DF | .~.~.~> Comprising a semiconductor with a charge carrier impurity {1} |