| 432 / | HD | HEATING |
| 120 | DF | WORK CHAMBER HAVING HEATING MEANS {12} |
| 200 | DF | .~ Work chamber having gaseous material supply or removal structure {2} |
| 201 | ![]() | .~.~ Air flow-through type {3} |
| 202 | DF | .~.~.~> Having means heating work by radiation or conduction |
| 203 | DF | .~.~.~> Pump for atmosphere |
| 204 | DF | .~.~.~> Having a movable drawer or separable tray |