| 432 / | HD | HEATING | 
| 120 | DF | WORK CHAMBER HAVING HEATING MEANS {12} | 
| 200 | DF | .~ Work chamber having gaseous material supply or removal structure {2} | 
| 201 |  | .~.~ Air flow-through type {3} | 
| 202 | DF | .~.~.~> Having means heating work by radiation or conduction | 
| 203 | DF | .~.~.~> Pump for atmosphere | 
| 204 | DF | .~.~.~> Having a movable drawer or separable tray |