432 / | HD | HEATING |
120 | DF | WORK CHAMBER HAVING HEATING MEANS {12} |
200 | DF | .~ Work chamber having gaseous material supply or removal structure {2} |
201 | .~.~ Air flow-through type {3} | |
202 | DF | .~.~.~> Having means heating work by radiation or conduction |
203 | DF | .~.~.~> Pump for atmosphere |
204 | DF | .~.~.~> Having a movable drawer or separable tray |