(under subclass 902) Process wherein plasma is used during any stage of the coating operation to deposit a diamond-like coating.
(1) Note. A plasma consists of a wholly or partially ionized gas composed of ions, electrons, and neutral particles. The concentrations of negatively and positively
charged carriers are approximately equal.
(2) Note. Processes utilizing corona, glow discharge, and cold plasma are found here, when utilized to cause disassociation or ionization of the vaporous reactants allowing a coating material (reaction product) to deposit on a substrate.
(3) Note. In a cold plasma the temperature of the electrons is high whereas the temperature of the ions is relatively low, possibly room temperature.
