US PATENT SUBCLASS 423 / 348
.~ Elemental silicon
Current as of:
June, 1999
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423 /
HD
CHEMISTRY OF INORGANIC COMPOUNDS
324
DF
SILICON OR COMPOUND THEREOF
{4}
348
.~ Elemental silicon {1}
349
DF
.~.~
> From silicon containing compound {1}
DEFINITION
Classification: 423/348
(under subclass 324) Products or processes wherein the product is elemental silicon.
SEE OR SEARCH CLASS
117, Single-Crystal, Oriented-Crystal, and Epitaxy Growth Processes; Non-Coating Apparatus Therefor, especially
54+, for liquid phase epitaxial growth processes and subclasses 84+ for vapor phase growth processes.
438, Semiconductor Device Manufacturing, particularly
478+, for methods of depositing semiconductive silicon which is to function as an active region of a barrier layer device.