422 / | HD | CHEMICAL APPARATUS AND PROCESS DISINFECTING, DEODORIZING, PRESERVING, OR STERILIZING |
129 | DF | CHEMICAL REACTOR {28} |
168 | DF | .~ Waste gas purifier {5} |
169 | .~.~ Including means providing sequential purification stages {1} | |
170 | DF | .~.~.~> Plural chemical reaction stages {2} |