US PATENT SUBCLASS 417 / 413.3-- .~.~.~.~ Of semiconductor material (e.g., silicon, germanium, etc.)

US PATENT SUBCLASS 417 / 413.3
.~.~.~.~ Of semiconductor material (e.g., silicon, germanium, etc.)

Current as of: June, 1999
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417 /	HD	PUMPS

321	DF	MOTOR DRIVEN {32}
410.1	DF	.~ Electric or magnetic motor {10}
412	DF	.~.~ Collapsible wall pump {1}
413.1	DF	.~.~.~ Diaphragm type {2}
413.3		.~.~.~.~ Of semiconductor material (e.g., silicon, germanium, etc.)

DEFINITION

Classification: 417/413.3

Of semiconductor material (e.g., silicon, germanium, etc.):

(under subclass 413.1) Apparatus wherein the membranelike member is made of a solid crystalline substance (e.g., silicon or germanium) that has an electrical conductivity greater than an insulator but less than a good conductor.

(1) Note. The membrane is constructed from the material used in an electric printed circuit and produced by using the same technique (e.g., etching, etc.) as used to produce the printed circuit.