US PATENT SUBCLASS 378 / 34
.~ Lithography

Current as of: June, 1999
Click HD for Main Headings
Click for All Classes

Internet Version by PATENTEC © 1999      Terms of Use


378 /   HD   X-RAY OR GAMMA RAY SYSTEMS OR DEVICES

1  DF  SPECIFIC APPLICATION {14}
34.~ Lithography {1}
35  DF  .~.~> Pattern mask

DEFINITION

Classification: 378/34

Lithography:

(under subclass 1) Subject matter including the projection of an X-ray image upon an X-ray sensitive resist usually through a patterned mask.