(under subclass 158) Subject matter wherein the material is a semiconductor which contains an element which is converted to a desired dopant by the neutron bombardment.
SEE OR SEARCH CLASS
117, Single-Crystal, Oriented-Crystal, and Epitaxy Growth Processes; Non-Coating Apparatus Therefor, for processes and non-coating apparatus for growing therein-defined single-crystal of all types of materials, and such processes combined with perfecting operations. A process comprising the step of irradiation to produce a nuclear transformation is provided for in Class 376.
438, Semiconductor Device Manufacturing: Process,
512, for methods of introducing an electrically active dopant into a semiconductor region having a combination of diverse steps in which one step involves the conversion of an element into a dopant by nuclear transmutation.
