| 372 / | HD | COHERENT LIGHT GENERATORS |
| 39 | DF | PARTICULAR ACTIVE MEDIA {7} |
| 55 | | .~ Gas {6} |
| 56 | DF | .~.~> Metal vapor |
| 57 | DF | .~.~> Excimer or exciplex |
| 58 | DF | .~.~> With means for controlling gas flow |
| 59 | DF | .~.~> Gas maintenance (e.g., purification, replenishment, etc.) |
| 60 | DF | .~.~> Including a specified gas additive |
| 61 | DF | .~.~> Discharge tube feature {4} |