US PATENT SUBCLASS 219 / 121.15
.~.~.~ Deposition (e.g., sputtering)

Current as of: June, 1999
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219 /   HD   ELECTRIC HEATING

50  DF  METAL HEATING (E.G., RESISTANCE HEATING) {19}
121.11  DF  .~ By arc {16}
121.12  DF  .~.~ Using electron beam {12}
121.15.~.~.~ Deposition (e.g., sputtering)

DEFINITION

Classification: 219/121.15

Deposition (e.g., sputtering):

(under subclass 121.12) Subject matter wherein an electron beam impinges on a workpiece to evaporate material therefrom.