US PATENT SUBCLASS 211 / 41.18
.~.~ Semiconductor wafer

Current as of: June, 1999
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211 /   HD   SUPPORTS: RACKS

13.1  DF  SPECIAL ARTICLE {32}
41.1  DF  .~ Platelike {8}
41.18.~.~ Semiconductor wafer

DEFINITION

Classification: 211/41.18

Semiconductor wafer:

(under subclass 41.1) Device specially designed to support semiconductor wafer (e.g., wafer boat).

SEE OR SEARCH CLASS

118, Coating Apparatus,

500, for a wafer holder or handling device for a wafer coating apparatus.

206, Special Receptacle or Package,

454, for a special package for wafers.