US PATENT SUBCLASS 118 / 900
SEMICONDUCTOR VAPOR DOPING
Current as of:
June, 1999
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118 /
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COATING APPARATUS
900
SEMICONDUCTOR VAPOR DOPING
DEFINITION
Classification: 118/900
SEMICONDUCTOR VAPOR DOPING:
Apparatus which implants impurities into a pure crystalline semiconductor material by vapor deposition to enhance the conductive characteristics of the semiconductor material.
