US PATENT SUBCLASS 117 / 913
GRAPHOEPITAXY OR SURFACE MODIFICATION TO ENHANCE EPITAXY
Current as of:
June, 1999
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117 /
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SINGLE-CRYSTAL, ORIENTED-CRYSTAL, AND EPITAXY GROWTH PROCESSES; NON-COATING APPARATUS THEREFOR
913
GRAPHOEPITAXY OR SURFACE MODIFICATION TO ENHANCE EPITAXY
DEFINITION
Classification: 117/913
GRAPHOEPITAXY OR SURFACE MODIFICATION TO ENHANCE EPITAXY:
(under the class definition) A collection of art which discloses modifying the surface of an epitaxy* substrate* to enhance or improve the growth or the product.
