117 / | HD | SINGLE-CRYSTAL, ORIENTED-CRYSTAL, AND EPITAXY GROWTH PROCESSES; NON-COATING APPARATUS THEREFOR |
200 | DF | APPARATUS {4} |
201 | .~ With means for measuring, testing, or sensing {2} | |
202 | DF | .~.~> With responsive control means |
203 | DF | .~.~> With a window or port for visual observation or examination |