117 / | HD | SINGLE-CRYSTAL, ORIENTED-CRYSTAL, AND EPITAXY GROWTH PROCESSES; NON-COATING APPARATUS THEREFOR |
11 | DF | PROCESSES OF GROWTH FROM LIQUID OR SUPERCRITICAL STATE {7} |
13 | DF | .~ Having pulling during growth (e.g., Czochralski method, zone drawing) {9} |
14 | .~.~ With a step of measuring, testing, or sensing (e.g., using TV, photo, or X-ray detector or weight changes) {1} | |
15 | DF | .~.~.~> With responsive control {1} |